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vacuum technologies INSTRUCTION MANUAL CT-100 Active Rough Vacuum Gauge Manual No. 699908070 Revision D February 2007
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CT-100 Active Rough Vacuum Gauge Alconox® is a registered trademark of Alconox, Inc. Apiezon® L grease is a registered trademark of M&I Materials Ltd. Copyright 2007 Varian, Inc.
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CT-100 Active Rough Vacuum Gauge Warranty Products manufactured by Seller are warranted against defects in materials and workmanship for twelve (12) months from date of shipment thereof to Customer, a...
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CT-100 Active Rough Vacuum Gauge Table of Contents Warranty Preface .......................................................................................................................................
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CT-100 Active Rough Vacuum Gauge List of Figures Figure Caption Page Dimensions, inches (mm), and Important Items 9-Pin D-subminiature Connector...........................................................
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CT-100 Active Rough Vacuum Gauge List of Tables Table Title Page Specifications............................................................................................................................
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CT-100 Active Rough Vacuum Gauge Preface EMC Warnings EN 55022 Class A Warning This is a Class A product. In a domestic environment this product may cause radio interference in which case the user may...
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CT-100 Active Rough Vacuum Gauge /1 /0 Hazard and Safety Information This manual uses the following standard safety protocols: WARNING The warning messages are for attracting the attention of the oper...
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CT-100 Active Rough Vacuum Gauge Equipment, General WARNING 1. Equipment tightness is guaranteed for normal operating conditions when the equipment leaves the factory. It is the user’s responsibility ...
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CT-100 Active Rough Vacuum Gauge /1 /0 Varian Services Please see our catalog, or contact us to learn of the services that are available to assist in your vacuum measurement and leak detection efforts...
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Declaration of Conformity Declaration of Conformity Konformitätserklärung Déclaration de Conformité Declaración de Conformidad Verklaring de Overeenstemming Dichiarazione di Conformità We Wir Varian, ...
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CT-100 Active Rough Vacuum Gauge Introduction The CT-100 Active Rough Vacuum Gauge provides pressure measurements over a range of 1x10-4 Torr (1.33x10-4 mbar) to atmosphere. The 0.2 second response ti...
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CT-100 Active Rough Vacuum Gauge /1 /0 Table 1 Specifications (Continued) Item Description Interface Setpoints Two user defined pressure setpoints for process steps, alarms, high vacuum gauge trigger,...
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CT-100 Active Rough Vacuum Gauge Setup and Calibration Factory Calibration The CT-100 is calibrated at the factory at high vacuum of 10-5 Torr (1.33x10-5 mbar). You will achieve the highest measuremen...
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CT-100 Active Rough Vacuum Gauge /1 /0 Tools and Equipment Have the following items available for setup and calibration. 7/16" wrench for the 1/8" NPT fitting Digital voltmeter 24 VDC power ...
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CT-100 Active Rough Vacuum Gauge Important items shown in the figure are: Potentiometers — Setpoints 1 and 2 Setpoint alarm LEDs These LEDs are OFF until the vacuum reaches the setpoint level. Thereaf...
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CT-100 Active Rough Vacuum Gauge /1 /0 Electrical Connections All signals and voltages are handled through a 9-pin D-subminiature connector mounted on the side of the CT-100 as shown in Figure 1 on pa...
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CT-100 Active Rough Vacuum Gauge Connecting to the Gauge The CT-100 generates five signal levels that are externally measured or sensed. These signals, with their pin location on the D-subminiature co...
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CT-100 Active Rough Vacuum Gauge /1 /0 The voltage on pins 1 and 2 are the switched collectors indicative of a tripped setpoint alarm. The equivalent circuit for these outputs is shown in Figure 5. Th...
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CT-100 Active Rough Vacuum Gauge Calibrating the Gauge Perform a recalibration every few months or more often as needed (see Table 6 on page 18) based on the temperature and the process chemistry in w...
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CT-100 Active Rough Vacuum Gauge /1 /0 Table 4 Air/N2 and Argon Calibration Data Pressure Pressure Pressure Vout Vout (Torr) (mbar) (Pa) (Air/N2) (Argon) To calibrate the CT-100: 1. Connect the gauge ...
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CT-100 Active Rough Vacuum Gauge 4. Plug the cable into the gauge and turn the power supply ON. 5. Allow the gauge to warm up for 1/2-hour. To calibrate at atmosphere, go to step 6. To calibrate at va...
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CT-100 Active Rough Vacuum Gauge /1 /0 Calibration at Intermediate Pressures The CT-100 can be calibrated at intermediate pressures to attain the best accuracy near that level, or to compensate for us...
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CT-100 Active Rough Vacuum Gauge Setting the Alarms The two setpoints are screwdriver adjusted as shown in Figure 9. Setpoint 1 Setpoint 2 Figure 9 Screwdriver Adjustment of the Setpoints The output v...
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CT-100 Active Rough Vacuum Gauge /1 /0 Voltmeter adjustment of a setpoint: 1. Connect power to a CT-100 gauge that has been calibrated. The voltage to be measured is from 0 up to 12 VDC. If necessary,...
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CT-100 Active Rough Vacuum Gauge Setpoint Adjustment from Panel Markings: Each setpoint can be brought to an approximate pressure level by rotating the screwdriver adjustment according to the markings...
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CT-100 Active Rough Vacuum Gauge /1 /0 Cleaning Exterior The exterior of the CT-100 may be kept clean using a cloth slightly dampened with water. Interior Remove all power from the CT-100 before openi...
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CT-100 Active Rough Vacuum Gauge Gauge Applications The CT-100 setpoint trigger can be used to enable or disable the sensor filament in an associated Eyesys precision vacuum gauge. The connections to ...
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CT-100 Active Rough Vacuum Gauge /1 /0 Troubleshooting Qualified Service The only user-serviceable procedure in the CT-100 is the replacement of the vacuum sensor as discussed in “Changing the Vacuum ...
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CT-100 Active Rough Vacuum Gauge Table 6 Troubleshooting (Continued) Symptom Possible Causes Corrective Action See... Analog output above 9 Supply voltage greater Reduce the supply volts at any pressu...
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CT-100 Active Rough Vacuum Gauge /1 /0 Table 6 Troubleshooting (Continued) Symptom Possible Causes Corrective Action See... Unable to calibrate Incorrect pressure Replace the sensor. Section “Changing...
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CT-100 Active Rough Vacuum Gauge Changing the Vacuum Sensor The thermal pressure vacuum sensor is mounted inside the plastic housing and is accessible for changing by opening the housing. Perform this...
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CT-100 Active Rough Vacuum Gauge /1 /0 5. Locate and unplug the red plastic connector that attaches the cable from the sensor to the circuit board, as shown in Figure 15. Sensor Red Plastic Connector ...
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CT-100 Active Rough Vacuum Gauge 8. Rotate the sensor so the Allen screw anchor hole is at the top of the assembly and is visible through the hole in the cover as shown in Figure 17. Figure 17 Positio...
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CT-100 Active Rough Vacuum Gauge /1 /0 Compatible Vacuum Pumps Table 7 Compatible Vacuum Pumps Product Vacuum Pumps SH-100 Dry Scroll Tri Scroll Series - TS-300, 320, 600, 620 Rotary Vane Turbo Molecu...