Page 1
vacuum technologies INSTRUCTION MANUAL 564 Ionization Gauge Tube Manual No. 699905564 Revision C December 2002
Page 2
564 Ionization Gauge Tube 564 Ionization Gauge Tube Copyright 2002 Varian Vacuum Technologies
Page 3
564 Ionization Gauge Tube Preface Warranty Products manufactured by Seller are warranted against defects in materials and workmanship for twelve (12) months from date of shipment thereof to Customer, ...
Page 4
564 Ionization Gauge Tube /1 /0 Hazard and Safety Information This manual uses the following standard safety protocols: WARNING The warning messages are for attracting the attention of the operator to...
Page 5
564 Ionization Gauge Tube Use with Combustibles and Mixtures WARNING As with all ionization gauges, this device is not intrinsically safe. Exercise extreme care when using this vacuum gauge while pump...
Page 6
564 Ionization Gauge Tube /1 /0 Contacting Varian Vacuum Technologies In the United States, you can contact Varian Vacuum Technologies Customer Service at 1-800-8VARIAN. Internet users: Send email to ...
Page 7
564 Ionization Gauge Tube Introduction The Varian 5641 Ionization Gauge Tube is designed specifically to be as rugged and reliable as the state of the art will permit2. Careful adherence to manufactur...
Page 8
564 Ionization Gauge Tube /1 /0 Electrical Connections Ensure that your vacuum system is grounded as shown in Figure 1. WARNING Before proceeding, test the system ground to be sure that it is complete...
Page 9
564 Ionization Gauge Tube Operation The 564 Ionization Gauge Tube can be used with a variety of commercial controls which are equipped for resistance degassing. NOTE It is particularly important to de...
Page 10
564 Ionization Gauge Tube /1 /0 Specifications Table 2 Vacuum Specifications Range 1x10-1 to 4x10-10 Torr* Maximum Operating Pressure 1x10-1 Torr (argon); 6x7-2 Torr (air) Pumping Speed, ionic 0.06 li...
Page 11
564 Ionization Gauge Tube Table 4 Operating Ratings Collector 0 VDC (ground)* Grid +180 VDC to ground Filament Bias Voltage +30 VDC to ground Filament Voltage 4.0 VAC nominal Filament Current Approxim...
Page 12
564 Ionization Gauge Tube /1 /0 Mounting The 564 Ionization Gauge Tube mounts in either a vertical or horizontal position and may be operated and degassed in either position for prolonged periods. An ...
Page 13
564 Ionization Gauge Tube Figure 2 564 Ionization Gauge Tube Outline Drawing
Page 14
564 Ionization Gauge Tube /1 /0 Use of the Gauge Tube The 564 Ionization Gauge Tube may be used to measure equivalent pressures of gases from 10-1 Torr down to the X-ray limit of the gauge. All ioniza...
Page 15
564 Ionization Gauge Tube X-ray Limit In ionization gauges, X-rays generated by the ionizing electrons hitting the grid produce a photoelectric emission at the ion collector. This causes a lower limit...
Page 16
564 Ionization Gauge Tube /1 /0 Gas Correction Factors Gas correction factor tables are only reproduced for the convenience of the user and do not imply that use with other gases will be safe with hot...
Page 17
564 Ionization Gauge Tube Table 7 Gas Correction Factors, continued
Page 18
564 Ionization Gauge Tube /1 /0 This page intentionally left blank.
Page 19
Request for Return Health and Safety Certification 1. Return authorization numbers (RA#) will not be issued for any product until this Certificate is completed and returned to a Varian Customer Servic...
Page 20
564 Ionization Gauge Tube /1 /0 Request for Return Health and Safety Certification FAILURE REPORT (Please describe in detail the nature of the malfunction to assist us in performing failure analysis):...
Page 21
564 Ionization Gauge Tube
Page 24
Sales and Service Offices Argentina Germany and Austria UK and Ireland Varian Argentina Ltd. Varian Deutschland Gmb H Varian Ltd. Sucursal Argentina Alsfelder Strasse 6 28 Manor Road Av. Ricardo Balbi...
