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Varian Vacuum Technologies 121 Hartwell Avenue Lexington, MA 02421-3133 (781) 861-7200 Linear-Series (800) 8-VARIAN Gate Valve Instruction Manual Manual No. 6999-12-050 Revision F December 2001
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WARRANTY Products manufactured by Seller are warranted against defects in materials and workmanship for twelve (12) months from date of shipment thereof to Customer, and Seller’s liability under valid...
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VOIDING THE WARRANTY Linear Gate Valves described in this manual are designed to be used in a clean system. Minute parti- cles such as a piece of lint can seriously affect the ability of the valve to ...
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Table of Contents Section Page Section I - Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-1 1-1 General . . . . . . . . . ...
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List of Illustrations Figure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Page Figure 1, Sheet 1 Pneumatic Linear Series Gate Valve A...
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SECTION I INTRODUCTION 1-1 GENERAL The Varian linear-series gate valves are designed for use in high- and ultrahigh- vacuum applications where reliable, dry-lubricated mechanisms are required. They op...
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Introduction ORDERING INFORMATION 11⁄2 Inch 21⁄2 Inch Order No. Order No. Manually-operated with visual position indicator Con Flat flanges, metal bonnet seal, and Viton main seal L8500301 L8560301 Co...
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Introduction TECHNICAL SPECIFICATIONS Valve Design Life 50,000 cycles Vacuum Range Atmosphere to 10-9 Torr Leak Rate Main seal less than 2 x 10-10 std cc/sec helium with 15 psi differential either dir...
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Introduction
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SECTION II INSTALLATION 2-1 UNPACKING Unpack the valve from the shipping container and inspect it for obvious damage. Retain the shipping container for evidence and call the carrier. If practical, ins...
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Installation
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SECTION III OPERATION 3-1 MANUALLY-OPERATED VALVE The manual valve operates by means of a hand-actuated knob. Turn the knob in a clockwise direc- tion to close the valve. To obtain a good vacuum seal,...
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Operation
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SECTION IV SERVICE 4-1 MAINTENANCE, ACTUATORS 4-1-1 Manual Valves (See Figure 1, Sheets 2) The stem screw has been lubricated with Fel-Pro C-100 (Varian part no. 9530031). After several bakeouts, the ...
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Service Apply a thin coat of lubricant to the O-ring (10) and insert it into the O-ring groove in the cylin- der cap. Assemble the cylinder cap to the air cylinder. Install four screws (16), lock wash...
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Service PARTS LIST Pneumatic Linear-Series Gate Valves Item Description 11⁄2 Inch 21⁄2 Inch Order No. Order No. Body Assy (-304 & -306) L8510301 L8561301 Body Assy (-305 & -307) L8521301 L8563...
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Service .0 et le ct ro -E tc er ia l N o. “B ” C lo se “C ” O pe Figure 1, Sheet 2. Manual Linear Series Gate Valve Assembly (11⁄2 inch valve shown)
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Service PARTS LIST Manual Linear-Series Gate Valves Item Description Order No. Order No. Body Assy (-301 & -302) L8510301 L8561301 Body Assy (-303) L8521301 L8563301 Bellows Assy L8541301 L8614301...
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Service 4-2 REMOVING THE VALVE FOR SERVICE The valve can be serviced without removing the body from the system; however, the valve must not be under a vacuum. Retract the valve mechanism to the open p...
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Service Remove the E clips (7) from the axles on the carriage casting and slide off the bearing wash- ers (12) and bearings (6). The carriage mechanism is now disassembled. 4-2-2 Cleaning Once the val...
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Service Install the O-ring in its groove by laying the O-ring over the groove evenly and pressing the O-ring into the groove in two places 180° apart, then two at 90°, and continue pressing until it i...
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Service 0.765 REF. Set Latched Figure 2, Sheet 2. Carriage Mechanism (11⁄2 inch valve shown) 4-3 POSITION INDICATOR (REMOTE) 4-3-1 Disassembly - See Figure 3 Disconnect electrical power to the Positio...
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Service 4-3-2 Replacing Microswitches Remove the mounting screws (6). Disconnect the soldered leads from the microswitch pins and remove the microswitch. Solder the leads to the new microswitch as out...
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Service GRN GRD WHTWHT Figure 3. Typical Position Indicator Assembly Slide the plastic nut, washer, and seal along the wires and tighten the nut in the connector. DO NOT OVERTIGHTEN. Plug the connecto...
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Service PARTS LIST Carriage Assembly - 11⁄2 Inch Linear Series Gate Valves Item Description Order No. Carriage, Machined L8621001 Disc Mount , Machined L8620001 Seal Disc L8516301 Roller Pin L8519001 ...
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Service PARTS LIST Position Indicator Item Description Order No. Order No. 11⁄2 Inch 21⁄2 Inch Bracket Assembly L8528301 L8615301 Position Indicator cover L8529001 L8617001 Threaded holder Q3033001 Q3...
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Service Plug the connector (4) into the base of the indicator and secure it with holding screw. Reconnect electrical power. 0.075 inch Figure 4. Set Screw Height Adjustment